IR Fourier spectroscopic ellipsometer SENDIRA for measurements in the IR spectrum

IR Fourier spectroscopic ellipsometer SENDIRA for measurements in the IR spectrum

IR Fourier spectroscopic ellipsometer SENDIRA for measurements in the IR spectrum

SENDIRA is a high-performance FT-IR (Fourier IR) ellipsometric system manufactured by SENTECH Instruments GmbH (Germany) with a spectral range of 400 cm-1 - 6000 cm-1 (1666-25000 nm.) and a computer-controlled motorized goniometer for measuring thickness and optical indicators of thin films in the IR spectrum.

Spectral range: 1666 to 25000 nm
FT-IR spectrometer as light source.
ACT (autocollimatic telescope) for sample alignment
SpectraRay/3 software package
Large number of options

Application: Measurement of thickness and refractive index of both single layers and multilayer films in production or laboratory.

This model is the ideal platform for MIR (Mid-IR) ellipsometric measurements with the ability to measure at different beam angles (angle resolution 0.005º, 0.01º step) and allows the use of a motorized stage (optional) to perform measurements over the entire surface of the sample in automatic mode (scanning - mapping).

The system has a horizontal sample stage large enough to allow easy measurements without placing the sample in a vertical position.

The angle of incidence (motorized goniometer) and the polarizer are computer controlled.

The SENDIRA system determines the ellipsometric angle Delta in the full range from 0º to 360º with high accuracy.

Accurate sample setup is an important factor when making ellipsometric measurements. SENDIRA is equipped with an Autocollimator (ACT) and an optical microscope for aligning samples in height and angle.

The SENDIRA system enables research in new areas such as the measurement of organic conductor layers, OLEDs, polymer films, SOI, etc.
 

Peculiarities

 

  • High stability and accuracy when measuring with a light source (FTIR spectrometer for the entire measurable range).
  • High sample alignment accuracy (height and tilt adjustment) with ACT (Autocollimatic Telescope).
  • Fully integrated support for multi-angle measurements with SENTECH's advanced SpectraRay/3 software.
  • A complete package of pre-installed applications in microelectronics, photovoltaics (solar cells), etc.
  • Friendly interface.
  • High measurement speed (less than 10 sec for full spectrum, over 500 wavelengths)
  • Powerful SpectraRay 3 software package for spectroscopic ellipsometry that allows you to measure psi, delta, tan[psi], cos[delta], Fourier coefficients (S1, S2), light scattering intensity as a function of wavelength, angle of incidence. SpectraRay 3 provides data acquisition, file management, numerical and/or graphical output of measured data and spectra, analysis of all kinds of optical spectral functions, simulation of results, and more. The software includes a large library of optical data and ready-to-use dielectric functions.

 


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