Budget probe station with manual control for research and small-scale production with the possibility of upgrading.
The SPS-2000 and SPS-2200 probe station are designed for DC, RF, and capacitive measurements, but the station can also be configured for temperature, photosensitive, and high frequency measurements. The station is fully upgradeable and configurable for any customer requirements.

Station characteristics:

- Testing on wafers up to 150 mm (SPS-2000) and up to 200 mm (SPS-2200)
- Manual control (two-way positioners) / Z-alignment, micro positioners
- Manual stage with XY movement - up to 155 x 155 mm ( for SPS-2000) and up to 200 x 200 mm (for SPS-2200)
- XY table movement resolution - 5 µm
- Manual Z movement. Stage Tilt Accuracy (Vertical Stiffness): ≤ 0.0015 µm (at 10 kg load)
- Theta Travel: 0° - 360°, ±6°
- Theta Resolution - 0.1°, Theta Reproducibility - 0, 1°
- Dimensions: 24”W x 24”D x 25”H (61cm x 61cm x 63cm)
- Weight: 68kg.

Standard configuration:

- Station platform
- 4 microprobe arms (2 left and 2 right) in standard configuration
- 4 standard probe arms and tungsten probe needles
- Long focal length stereomicroscope (digital camera optional)
- Magnification up to 180x
- High power LED illuminator with adjustable illumination intensity
- 10x and 20x microscope
eyepieces - Auxiliary 0.5x (Barlow) microscope lens
- Standard oil-free or ultra-quiet vacuum pump for clamping
- Shielding from internal radio interference (EMI shielding)
- No commissioning and no field trip required specialist
 

Options and additional accessories:

- Heated stage (temperature range on request)
- Cooled stage (temperature range on request)
- Heated/cooled stage (temperature range on request)
- Plate holders: up to 100 mm, up to 150 mm
- Holder processing: (polished brass , anodized aluminium, gold-plated polished brass)
- High-definition digital camera: selectable 9.1 ; 5.0 or 1.3 Megapixels
- Microscope mount for XY movement in 50 x 50mm range
- Console mount for XYZ movement
- Camera software for dimensioning and image capture
- Microscope upgrade for up to 400x magnification
- Light shielding (protection) for photosensitive measurements
- Shielding (protection) against RF interference
- Laser or ultrasonic cutter
- High resolution micropositioners with vacuum base
- High resolution micropositioners with magnetic base
- Semi-flexible probe arms with BNC connectors
- TRIAX, BNC, Pin- plug connectors
- Probes: active, passive, RF, triaxial, coaxial, low impedance
- Microxact can be used with all major board manufacturers