High value for money semi-automatic vacuum probe station with PC or manual control for research and small scale production with upgrade options. DC and RF measurements, capacitance measurement is upgradeable.
The SPS-2600-VAC and SPS-2800-VAC series of vacuum stations are designed for semi-automatic testing on wafers up to 100 mm and up to 200 mm in vacuum or controlled atmosphere. The system is mounted on an anti-vibration platform. The system can be configured for a variety of applications.
Ideal for frost-free testing at temperatures up to 77K or elevated temperatures.
Station characteristics:
- Testing on plates up to 100 mm. and up to 200 mm
- Standard repeatability/resolution (+/-7 µm/1.5 µm) and high repeatability/resolution (+/-2 µm/100 nm) in XY
- Repeatability/resolution in Z (+/-2 µm ) / 100 nm)
- Available with both manual and motorized Tetta table
- up to 4 or up to 6 micromanipulators
- Sample card can also be installed
- Choice of digital microscopes
- BNC, Triax connectors, DC and RF probes.
- High-resolution micropositioners for micromanipulation of probes
- Thermo-cryo plate holder with temperatures from 77K to 680K
- Pressure control software (optional)
- Possibility to choose means of pumping (fore pump or fore pump+turbine)
- Software for automation: XactTest™
