CER SE 500adv is a unique combined laser (scanning) ellipsometer-reflectometer manufactured by SENTECH Instruments GmbH (Germany) with the ability to measure films at different angles, designed for high-precision measurement of the thickness and optical characteristics of film structures (refractive index, absorption index) on various types of surfaces. Measurement of nanofilms.

Ellipsometer wavelength - 632.8 nm
Reflectometer wavelength range - 450-920 nm.
Film thickness measurement range with ellipsometer: 1 nm to 6000 nm.
Film thickness measurement range with reflectometer: 50 nm to 25000 nm.

Application: Measurement of thickness and refractive index of single layers or two-layer films (with known sublayer parameters) in production or laboratory and multilayer films with reflectivity.
 

Peculiarities

• Combined system including laser ellipsometer and FTPadv reflectometer with one instrument.
• Extended range of film thickness measurement from 1 to 25000 nm.
• High stability and accuracy when measuring with a light source (HeNe laser, 632.8 nm.), thermally stabilized compensator, polarizer control, ultra low noise detector.
• High accuracy of sample alignment (height and tilt adjustment) using an autocollimatic telescope (ACT).
• Fully integrated support for multi-angle measurements with advanced SENTECH software.
• A complete package of pre-installed applications in microelectronics, photovoltaics (solar cells), etc.
• Friendly interface and ease of operation.
• High measurement speed
• SENTECH Ellipsometric Measurement Software including Application Library

n, k bulk material

thickness of monolayers

thickness and refractive index of monolayers

thickness and refractive index of the upper layer of the double layer

specified ellipsometric applications
 

Options :

- 30 µm microspot (spot focusing)

- Manual xy stage (travel - 150 mm) for mapping (mapping)

- Motorized computer controlled stages for samples up to 200 mm in diameter and high precision movement for mapping (mapping)

- Video camera for alignment of the sample instead of the eyepiece with image output and PC.

- Liquid cell

- Autofocus in combination with a motorized sample leveling

stage - Reflectometer (Film Thickness Probe) FTPadv with a spot diameter of 80 µm.

- Simulation software (SIMULATION Software)

- Installation for measurements of films on crystalline silicon (textured)