Spectroscopic (spectral) reflectometers models RM 1000 and RM 2000 manufactured by SENTECH Instruments GmbH (Germany) for research and production. They are used to measure transparent, poorly absorbent films on reflective, transparent and absorbent samples by a spectroscopic method based on the refraction of white light.
Measurement of refractive index and film thickness and absorbance on various types of surfaces. Including routine measurements in the manufacture of microelectronic products (measurement of the thickness of resists, oxides, etc.)

Spectral range:
RM 1000: 430-930 nm.
RM 2000: 200 - 1000 nm.

Measurements performed by these instruments include measurements of single-layer and multi-layer coatings on semiconductors, glass, plastic, metal and glossy paper

Application: Measurement of the thickness and refractive index of single layers or multilayer transparent and translucent films in production or laboratory.
 

Peculiarities

• Measurement of films on both smooth and rough surfaces.
• Extended film thickness measurement range from 2 to 50,000 nm (depending on model).
• The measurement spot size is 80 and 100 µm, which allows measurements on the topology of the wafer
• High stability and measurement accuracy.
• High accuracy of sample alignment (height and tilt adjustment) using an autocollimatic telescope (ACT).
• A complete package of pre-installed applications in microelectronics, photovoltaics (solar cells), etc.
• Friendly interface and ease of operation.
• High measurement speed
• FTPadv EXPERT SENTECH measurement software including application library
  n, k bulk material
  thickness of monolayers
  thickness and refractive index of monolayers
  thickness and refractive index of upper layer and multilayer structure
• Large material database for measurements

Options:

- Computer-controlled motorized tables for samples up to 200 mm in diameter and high-precision movement for mapping (mapping)

- Video camera for sample alignment instead of an eyepiece with image output and PC.

- Simulation software (SpectraRay/3)

- Installation for measuring films on crystalline silicon (textured)