MicroXact Incorporated (USA) - the company develops and manufactures a wide range of probe stations for control in semiconductor manufacturing and research. The systems are as accessible and easy to use as possible. Designed by MicroXact Inc. accurate and reliable analytical systems for probe measurements can be fully optimized for almost any task and customer requirements. Technically, probe stations can be designed for wafers up to 200 mm in diameter. and are configured for DC, RF, temperature and optical measurements in both manual and automatic modes.

High value for money semi-automatic probe station with PC or manual control for research and small scale production with upgrade option. DC and RF measurements, capacitance measurement is upgradeable. An enlarged version of the SPS-2600 probe station.

The SPS-2800 probe station is designed for DC, RF, and capacitive measurements, but the station can also be configured for temperature, photosensitive, and high frequency measurements. The station is fully upgradeable and configurable for any customer requirements.

Station characteristics:
- Testing on plates up to 200 mm. (8")
- 4 probe arms (2 left and 2 right) as standard (up to 10)
- Stereo microscope with long focal length and high power LED illuminator
- VXM motorized stage for XY
movement - XY movement range up to 229 x 229 mm.
- XY Stage Movement Resolution - ±3.2 µm (±0.8 µm - SPS-2800-PLUS)
- Repeatability - <6 µm (<2 µm - SPS-2800-PLUS)
- Accuracy - <25 µm (< 10 µm - SPS-2800-PLUS)
- Z movement is motorized.
- Z travel - 12.7 mm
- Z travel resolution - ±0.8 µm (±0.2 µm - SPS-2800-PLUS)
- Z repeatability - <1.5 µm (<1 µm - SPS- 2800-PLUS)
- Accuracy - <6.5 µm (<2.5 µm - SPS-2800-PLUS)
- Stage tilt accuracy (vertical stiffness): ≤ 0.0015 µm (at 10 kg load)
- Movement in Theta: 0° - 360°, ±6°
- Resolution in Theta - 0.1° (0.05° - SPS-2800-PLUS)
- Control with PC and joystick
- COSMOS software, program manual
- Shielding against internal radio interference (EMI shielding)
- Options and upgrades

Standard configuration:
- Station platform
- 4 microprobe arms (2 left and 2 right) in standard configuration
- 4 standard probe arms and tungsten probe needles
- Stereo microscope with a long focal length (digital camera - optional)
- Magnification up to 180x (up to 4000x - optional)
- High power LED illuminator with adjustable light intensity
- 10x and 20x microscope eyepieces
- Auxiliary 2x (Barlow) microscope lens
- Standard oil-free or ultra-quiet vacuum pump for clamping
- EMI shielding (EMI shielding)

Options and optional accessories:
- Heated stage (temperature range on request ) )
- Cooled stage (temperature range on request)
- Heated/cooled stage (temperature range on request)
- Plate holders: up to 100 mm, 150 mm and up to 200 mm.
- Finishing of holders: (polished brass, anodized aluminum, gold-plated polished brass)
- High-definition digital camera: optional 9.1 ; 5.0 or 1.3 Megapixels
- Microscope mount for XY movement in 50 x 50mm range
- Cantilever mount for XYZ movement
- Camera software for dimensioning and image capture
- Microscope upgrade for up to 4000x magnification
- Light shielding (protection) for photosensitive measurements
- Shielding (protection) from RF interference
- Laser or ultrasonic cutter
- High resolution micro positioners with vacuum base
- High resolution micro positioners with magnetic base
- Semi-flexible probe arms with BNC connectors
- TRIAX, BNC, Pin-plug connectors
- Probes: active, passive, RF, triax, coax, low impedance
- Microxact can be used with all major board manufacturers