SENDURO® high-performance automatic ellipsometric measuring system based on a UV-VIS spectroscopic ellipsometer with the ability to scan manufactured by SENTECH Instruments GmbH (Germany) for measuring the thickness and optical properties of thin films in production.
Spectral range: 290 to 850 nm
Fully automatic sample alignment at the touch of a button
SpectraRay/3 software package
Motorized scanning stages
Work with plates up to 200 mm and up to 300 mm.
Application: Measurement of thickness and refractive index of both single layers and multilayer films in production.
SENDORO® can be used both for research purposes and in mass production for measurements on substrates up to 200 mm and up to 300 mm.
SENTECH also offers the fully automatic SENDURO® 300 system with cassette station for measuring on wafers up to 300 mm. The system allows measuring film thickness in the range from a few angstroms to 50 microns. The unit is equipped with a robot for loading plates from cassette to cassette.
Peculiarities
- High stability and measurement accuracy
- High sample measurement speed
- Measurement of film thicknesses from 1 nm. up to 10,000 nm. (ultra-thin films)
- Measurement of optical characteristics of films
- Fully automatic sample alignment during measurement
- Measurements on transparent and absorbent substrates
- Button control
- User friendly SpectraRay/3 software
- Minimum preparation for instrument installation
- Does not require highly skilled operator
- A complete package of pre-installed applications in microelectronics, photovoltaics (solar cells), etc.
- Friendly interface.
- High measurement speed (less than 10 sec for full spectrum, over 500 wavelengths)
- Powerful SpectraRay/3 software package for spectroscopic ellipsometry that allows you to measure psi, delta,tan[psi], cos[delta], Fourier coefficients (S1, S2), light scattering intensity as a function of wavelength, angle of incidence. SpectraRay/3 provides data acquisition, file management, numerical and/or graphical output of measured data and spectra, analysis of all kinds of optical spectral functions, simulation of results, and more. The software includes a large library of optical data and ready-to-use dielectric functions.
