SENpro is a budget spectroscopic UV-VIS (UV-VIS) ellipsometer manufactured by SENTECH Instruments GmbH (Germany) with the ability to measure films at various angles, designed for high-precision measurement of the thickness and optical characteristics of both single-layer films and multilayer film structures (refractive index, index absorption) on various types of surfaces. Measurement of nanofilms.
Spectral range: 370 - 1050 nm.
SpectraRay/3 software package
Application: Measurement of thickness and refractive index of both single layers and multilayer films in production or laboratory.
Peculiarities
- High stability and accuracy when measuring with a light source (Tungsten-Halogen lamp, 370-1050 nm.).
- High accuracy of sample alignment (height and tilt adjustment).
- Fully integrated support for multi-angle measurements with SENTECH's advanced SpectraRay/3 software.
- A complete package of pre-installed applications in microelectronics, photovoltaics (solar cells), etc.
- Friendly interface.
- High measurement speed (less than 10 sec for full spectrum, over 500 wavelengths)
- Powerful SpectraRay 3 software package for spectroscopic ellipsometry that allows you to measure psi, delta, tan[psi], cos[delta], Fourier coefficients (S1, S2), light scattering intensity as a function of wavelength, angle of incidence. SpectraRay 3 provides data acquisition, file management, numerical and/or graphical output of measured data and spectra, analysis of all kinds of optical spectral functions, simulation of results, and more. The software includes a large library of optical data and ready-to-use dielectric functions.
