Ion sputtering

Ion sputtering

Angstrom Engineering Inc. (Canada) - manufactures vacuum sputter deposition, electron beam evaporation, ion-assisted deposition, resistive thermal evaporation and space emulation equipment.
Angstrom Engineering Inc. (Canada) is a rapidly growing and one of the fastest growing technology companies in Canada. The company, founded in 1992, is currently a global player in the vacuum process and research equipment market. Today the company offers equipment for various vacuum film deposition processes, such as magnetron deposition (sputter deposition), electron beam evaporation (electron beam evaporation), ion-assisted deposition, resistive thermal evaporation, as well as space emulation equipment. Ion

Assisted Deposition

In IAD (ion sputtering), a broad ion beam source directs a scattered ion beam of ions of various energies directly onto the substrate, usually in conjunction with a magnetron sputtering source or an electron beam sputtering source. An inert gas such as Ar or reactive gases such as O2 and N2 can be used to provide additional chemical reactions during film growth. IAD processes improve film growth processes through surface reactions, control film density and improve film adhesion. Angstrom Engineering can enhance your system by adding an ion source for your processes. Angstrom Engineering's software solutions allow precise, thorough control of processes in systems.

Systems available for the process: Nexdep │ Amod │ Evovac │ Others on request


Equipment request